Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers

Sang Youl Kim

doi:10.3807/KJOP.2015.26.5.275

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2015 Vol.26, Issue 5 Preview Page

Ellipsometric Expressions for a Sample Coated with Uniaxially Anisotropic Layers 단축 이방성 박막들이 코팅된 시료의 타원식

25 October 2015. pp. 275-282

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Abstract

단축이방성 박막들과 등방성 박막들이 코팅되어 있는 시료에 비스듬히 입사한 빛의 유효반사계수 표현들을 유도하였다. 단축이방성 박막 내에서의 다중반사 효과를 반영하여 여러 층의 등방성 박막들과 이방성 박막들이 섞여 있는 시료의 유효반사계수 표현들과 타원상수 표현들을 제시함으로써 시료면에 수직한 방향으로 균일하지 않은 단축이방성 분포를 가진 시료의 광학이방성을 여러 개의 단축이방성 박막으로 나누어 분석할 수 있도록 하였다.

키워드

반사타원법

단축이방성 다층박막

광축의 분포

The effective reflection coefficients for light obliquely incident upon a substrate coated with uniaxially anisotropic films and with isotropic films are derived. Multiple reflections inside anisotropic films, as well as those inside isotropic films, are properly treated. These expressions, together with the related ellipsometric expressions, can be used to find the nonuniform distribution of an uniaxially anisotropic film perpendicular to the film's surface, by approximating it as consisting of uniaxially anisotropic uniform layers and applying the conventional modeling technique for spectroscopic ellipsometry.

Keywords

Reflection ellipsometry

Uniaxial layers

Distribution of optic axis

References

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Information

Publisher :Optical Society of Korea
Publisher(Ko) :한국광학회
Journal Title :Korean Journal of Optics and Photonics
Journal Title(Ko) :한국광학회지
Volume : 26
No :5
Pages :275-282
Received Date :2015. 07. 23
Revised Date :2015. 09. 02
Accepted Date : 2015. 09. 14
DOI :https://doi.org/10.3807/KJOP.2015.26.5.275

Korean Journal of Optics and Photonics ISSN:1225-6285(Print) 2287-321X(Online) 한국광학회지

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