Ex) Article Title, Author, Keywords
Ex) Article Title, Author, Keywords
2017; 28(1): 9-15
Published online February 25, 2017 https://doi.org/10.3807/KJOP.2017.28.1.009
Copyright © Optical Society of Korea.
Lee, Geun-Jae; Cho, Hyun Mo; Jo, Jae Heung
이근재; 조현모; 조재흥
Keywords: Fourier optics, Fraunhofer diffraction, Defect inspection
Keywords: 푸리에 광학; 프라운호퍼 회절; 결함검출
pISSN 1225-6285
eISSN 2287-321X